5/23/2012	11:50:45 AM	Main Vac valve closed
5/23/2012	11:50:56 AM	Main Vac valve opened
5/23/2012	1:08:16 PM	Bypass valve opened
5/23/2012	1:08:16 PM	Bypass valve closed
5/23/2012	1:08:18 PM	Bypass valve opened
5/23/2012	1:08:25 PM	Bypass valve closed
5/23/2012	1:08:54 PM	Main Vac valve closed
5/23/2012	1:09:00 PM	Main Vac valve opened
5/23/2012	1:09:09 PM	Bypass valve opened
5/23/2012	1:09:09 PM	Bypass valve closed
5/23/2012	1:09:10 PM	Bypass valve opened
5/23/2012	1:09:10 PM	Bypass valve closed
5/23/2012	1:10:31 PM	Main Vac valve closed
5/23/2012	1:11:30 PM	Helium MFC set to  500.000000
5/23/2012	1:11:35 PM	Helium valve opened
5/23/2012	1:12:49 PM	Helium valve closed
5/23/2012	1:12:52 PM	Helium valve opened
5/23/2012	1:12:58 PM	Helium valve closed
5/23/2012	1:14:57 PM	Bypass valve opened
5/23/2012	1:15:12 PM	Bypass valve closed
5/23/2012	1:15:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2012	1:15:17 PM	Recipe started at 1:15 PM
5/23/2012	1:15:17 PM	Helium valve closed
5/23/2012	1:15:17 PM	H2 valve closed
5/23/2012	1:15:17 PM	BCl3 valve closed
5/23/2012	1:15:17 PM	PH3 valve closed
5/23/2012	1:15:17 PM	SiCl4 pre valve closed
5/23/2012	1:15:17 PM	SiCl4 post valve closed
5/23/2012	1:15:17 PM	Main Vac valve closed
5/23/2012	1:15:17 PM	Bypass valve closed
5/23/2012	1:15:17 PM	Bubbler valve closed
5/23/2012	1:15:17 PM	Helium MFC set to  0.000000
5/23/2012	1:15:17 PM	H2 MFC set to  0.000000
5/23/2012	1:15:17 PM	BCl3 MFC set to  0.000000
5/23/2012	1:15:17 PM	PH3 MFC set to  0.000000
5/23/2012	1:15:17 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:15:17 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	1:15:17 PM	Tube furnace set to 0
5/23/2012	1:15:21 PM	H2 valve closed
5/23/2012	1:15:21 PM	BCl3 valve closed
5/23/2012	1:15:21 PM	PH3 valve closed
5/23/2012	1:15:21 PM	SiCl4 pre valve closed
5/23/2012	1:15:21 PM	SiCl4 post valve closed
5/23/2012	1:15:21 PM	Main Vac valve closed
5/23/2012	1:15:21 PM	Bypass valve closed
5/23/2012	1:15:21 PM	Bubbler valve closed
5/23/2012	1:15:21 PM	Helium valve opened
5/23/2012	1:15:21 PM	Helium MFC set to  500.000000
5/23/2012	1:15:21 PM	H2 MFC set to  0.000000
5/23/2012	1:15:21 PM	BCl3 MFC set to  0.000000
5/23/2012	1:15:21 PM	PH3 MFC set to  0.000000
5/23/2012	1:15:21 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:15:21 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	1:15:21 PM	Tube furnace set to 0
5/23/2012	1:16:26 PM	Helium valve closed
5/23/2012	1:16:26 PM	H2 valve closed
5/23/2012	1:16:26 PM	BCl3 valve closed
5/23/2012	1:16:26 PM	PH3 valve closed
5/23/2012	1:16:26 PM	SiCl4 pre valve closed
5/23/2012	1:16:26 PM	SiCl4 post valve closed
5/23/2012	1:16:26 PM	Main Vac valve closed
5/23/2012	1:16:26 PM	Bypass valve closed
5/23/2012	1:16:26 PM	Bubbler valve closed
5/23/2012	1:16:26 PM	Helium MFC set to  0.000000
5/23/2012	1:16:26 PM	H2 MFC set to  0.000000
5/23/2012	1:16:26 PM	BCl3 MFC set to  0.000000
5/23/2012	1:16:26 PM	PH3 MFC set to  0.000000
5/23/2012	1:16:26 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:16:26 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	1:16:27 PM	Tube furnace set to 0
5/23/2012	1:16:28 PM	Run finished at 1:16 PM
5/23/2012	1:16:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2012	1:16:40 PM	Bypass valve opened
5/23/2012	1:16:42 PM	Bypass valve closed
5/23/2012	1:16:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2012	1:16:45 PM	Recipe started at 1:16 PM
5/23/2012	1:16:45 PM	Helium valve closed
5/23/2012	1:16:45 PM	H2 valve closed
5/23/2012	1:16:45 PM	BCl3 valve closed
5/23/2012	1:16:45 PM	PH3 valve closed
5/23/2012	1:16:45 PM	SiCl4 pre valve closed
5/23/2012	1:16:45 PM	SiCl4 post valve closed
5/23/2012	1:16:45 PM	Main Vac valve closed
5/23/2012	1:16:45 PM	Bypass valve closed
5/23/2012	1:16:45 PM	Bubbler valve closed
5/23/2012	1:16:45 PM	Helium MFC set to  0.000000
5/23/2012	1:16:45 PM	H2 MFC set to  0.000000
5/23/2012	1:16:45 PM	BCl3 MFC set to  0.000000
5/23/2012	1:16:45 PM	PH3 MFC set to  0.000000
5/23/2012	1:16:45 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:16:45 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	1:16:45 PM	Tube furnace set to 0
5/23/2012	1:16:48 PM	H2 valve closed
5/23/2012	1:16:48 PM	BCl3 valve closed
5/23/2012	1:16:48 PM	PH3 valve closed
5/23/2012	1:16:48 PM	SiCl4 pre valve closed
5/23/2012	1:16:48 PM	SiCl4 post valve closed
5/23/2012	1:16:48 PM	Main Vac valve closed
5/23/2012	1:16:48 PM	Bypass valve closed
5/23/2012	1:16:48 PM	Bubbler valve closed
5/23/2012	1:16:48 PM	Helium valve opened
5/23/2012	1:16:48 PM	Helium MFC set to  500.000000
5/23/2012	1:16:48 PM	H2 MFC set to  0.000000
5/23/2012	1:16:48 PM	BCl3 MFC set to  0.000000
5/23/2012	1:16:48 PM	PH3 MFC set to  0.000000
5/23/2012	1:16:48 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:16:48 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	1:16:48 PM	Tube furnace set to 0
5/23/2012	1:17:22 PM	Run aborted at 1:17 PM
5/23/2012	1:17:22 PM	Helium valve closed
5/23/2012	1:17:22 PM	H2 valve closed
5/23/2012	1:17:22 PM	BCl3 valve closed
5/23/2012	1:17:22 PM	PH3 valve closed
5/23/2012	1:17:22 PM	SiCl4 pre valve closed
5/23/2012	1:17:22 PM	SiCl4 post valve closed
5/23/2012	1:17:22 PM	Bypass valve closed
5/23/2012	1:17:22 PM	Main Vac valve closed
5/23/2012	1:17:22 PM	Bubbler valve closed
5/23/2012	1:17:22 PM	Helium MFC set to  0.000000
5/23/2012	1:17:22 PM	H2 MFC set to  0.000000
5/23/2012	1:17:22 PM	BCl3 MFC set to  0.000000
5/23/2012	1:17:22 PM	PH3 MFC set to  0.000000
5/23/2012	1:17:22 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:17:23 PM	Tube furnace set to 0
5/23/2012	1:17:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2012	1:17:28 PM	Bypass valve opened
5/23/2012	1:17:32 PM	Bypass valve closed
5/23/2012	1:17:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2012	1:17:36 PM	Recipe started at 1:17 PM
5/23/2012	1:17:36 PM	Helium valve closed
5/23/2012	1:17:36 PM	H2 valve closed
5/23/2012	1:17:36 PM	BCl3 valve closed
5/23/2012	1:17:36 PM	PH3 valve closed
5/23/2012	1:17:36 PM	SiCl4 pre valve closed
5/23/2012	1:17:36 PM	SiCl4 post valve closed
5/23/2012	1:17:36 PM	Main Vac valve closed
5/23/2012	1:17:36 PM	Bypass valve closed
5/23/2012	1:17:36 PM	Bubbler valve closed
5/23/2012	1:17:36 PM	Helium MFC set to  0.000000
5/23/2012	1:17:36 PM	H2 MFC set to  0.000000
5/23/2012	1:17:36 PM	BCl3 MFC set to  0.000000
5/23/2012	1:17:36 PM	PH3 MFC set to  0.000000
5/23/2012	1:17:36 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:17:36 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	1:17:36 PM	Tube furnace set to 0
5/23/2012	1:17:39 PM	H2 valve closed
5/23/2012	1:17:39 PM	BCl3 valve closed
5/23/2012	1:17:39 PM	PH3 valve closed
5/23/2012	1:17:39 PM	SiCl4 pre valve closed
5/23/2012	1:17:39 PM	SiCl4 post valve closed
5/23/2012	1:17:39 PM	Main Vac valve closed
5/23/2012	1:17:39 PM	Bypass valve closed
5/23/2012	1:17:39 PM	Bubbler valve closed
5/23/2012	1:17:39 PM	Helium valve opened
5/23/2012	1:17:39 PM	Helium MFC set to  500.000000
5/23/2012	1:17:39 PM	H2 MFC set to  0.000000
5/23/2012	1:17:39 PM	BCl3 MFC set to  0.000000
5/23/2012	1:17:39 PM	PH3 MFC set to  0.000000
5/23/2012	1:17:39 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:17:39 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	1:17:40 PM	Tube furnace set to 0
5/23/2012	1:17:58 PM	Run aborted at 1:17 PM
5/23/2012	1:17:58 PM	Helium valve closed
5/23/2012	1:17:58 PM	H2 valve closed
5/23/2012	1:17:58 PM	BCl3 valve closed
5/23/2012	1:17:58 PM	PH3 valve closed
5/23/2012	1:17:58 PM	SiCl4 pre valve closed
5/23/2012	1:17:58 PM	SiCl4 post valve closed
5/23/2012	1:17:58 PM	Bypass valve closed
5/23/2012	1:17:58 PM	Main Vac valve closed
5/23/2012	1:17:58 PM	Bubbler valve closed
5/23/2012	1:17:58 PM	Helium MFC set to  0.000000
5/23/2012	1:17:58 PM	H2 MFC set to  0.000000
5/23/2012	1:17:58 PM	BCl3 MFC set to  0.000000
5/23/2012	1:17:58 PM	PH3 MFC set to  0.000000
5/23/2012	1:17:58 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:17:58 PM	Tube furnace set to 0
5/23/2012	1:17:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2012	1:18:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2012	1:18:16 PM	Recipe started at 1:18 PM
5/23/2012	1:18:16 PM	Helium valve closed
5/23/2012	1:18:16 PM	H2 valve closed
5/23/2012	1:18:16 PM	BCl3 valve closed
5/23/2012	1:18:16 PM	PH3 valve closed
5/23/2012	1:18:16 PM	SiCl4 pre valve closed
5/23/2012	1:18:16 PM	SiCl4 post valve closed
5/23/2012	1:18:16 PM	Main Vac valve closed
5/23/2012	1:18:16 PM	Bypass valve closed
5/23/2012	1:18:16 PM	Bubbler valve closed
5/23/2012	1:18:16 PM	Helium MFC set to  0.000000
5/23/2012	1:18:16 PM	H2 MFC set to  0.000000
5/23/2012	1:18:16 PM	BCl3 MFC set to  0.000000
5/23/2012	1:18:16 PM	PH3 MFC set to  0.000000
5/23/2012	1:18:16 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:18:16 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	1:18:17 PM	Tube furnace set to 0
5/23/2012	1:18:20 PM	H2 valve closed
5/23/2012	1:18:20 PM	BCl3 valve closed
5/23/2012	1:18:20 PM	PH3 valve closed
5/23/2012	1:18:20 PM	SiCl4 pre valve closed
5/23/2012	1:18:20 PM	SiCl4 post valve closed
5/23/2012	1:18:20 PM	Main Vac valve closed
5/23/2012	1:18:20 PM	Bypass valve closed
5/23/2012	1:18:20 PM	Bubbler valve closed
5/23/2012	1:18:20 PM	Helium valve opened
5/23/2012	1:18:20 PM	Helium MFC set to  500.000000
5/23/2012	1:18:20 PM	H2 MFC set to  0.000000
5/23/2012	1:18:20 PM	BCl3 MFC set to  0.000000
5/23/2012	1:18:20 PM	PH3 MFC set to  0.000000
5/23/2012	1:18:20 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:18:20 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	1:18:20 PM	Tube furnace set to 0
5/23/2012	1:18:47 PM	Helium valve closed
5/23/2012	1:18:47 PM	H2 valve closed
5/23/2012	1:18:47 PM	BCl3 valve closed
5/23/2012	1:18:47 PM	PH3 valve closed
5/23/2012	1:18:47 PM	SiCl4 pre valve closed
5/23/2012	1:18:47 PM	SiCl4 post valve closed
5/23/2012	1:18:47 PM	Main Vac valve closed
5/23/2012	1:18:47 PM	Bypass valve closed
5/23/2012	1:18:47 PM	Bubbler valve closed
5/23/2012	1:18:47 PM	Helium MFC set to  0.000000
5/23/2012	1:18:47 PM	H2 MFC set to  0.000000
5/23/2012	1:18:47 PM	BCl3 MFC set to  0.000000
5/23/2012	1:18:47 PM	PH3 MFC set to  0.000000
5/23/2012	1:18:47 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:18:47 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	1:18:47 PM	Tube furnace set to 0
5/23/2012	1:18:48 PM	Run finished at 1:18 PM
5/23/2012	1:18:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2012	1:19:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2012	1:19:14 PM	Recipe started at 1:19 PM
5/23/2012	1:19:14 PM	Helium valve closed
5/23/2012	1:19:14 PM	H2 valve closed
5/23/2012	1:19:14 PM	BCl3 valve closed
5/23/2012	1:19:14 PM	PH3 valve closed
5/23/2012	1:19:14 PM	SiCl4 pre valve closed
5/23/2012	1:19:14 PM	SiCl4 post valve closed
5/23/2012	1:19:14 PM	Main Vac valve closed
5/23/2012	1:19:14 PM	Bubbler valve closed
5/23/2012	1:19:14 PM	Bypass valve opened
5/23/2012	1:19:14 PM	Helium MFC set to  0.000000
5/23/2012	1:19:14 PM	H2 MFC set to  0.000000
5/23/2012	1:19:14 PM	BCl3 MFC set to  0.000000
5/23/2012	1:19:14 PM	PH3 MFC set to  0.000000
5/23/2012	1:19:14 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:19:14 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	1:19:14 PM	Tube furnace set to 0
5/23/2012	1:20:12 PM	Helium valve closed
5/23/2012	1:20:12 PM	H2 valve closed
5/23/2012	1:20:12 PM	BCl3 valve closed
5/23/2012	1:20:12 PM	PH3 valve closed
5/23/2012	1:20:12 PM	SiCl4 pre valve closed
5/23/2012	1:20:12 PM	SiCl4 post valve closed
5/23/2012	1:20:12 PM	Main Vac valve closed
5/23/2012	1:20:12 PM	Bubbler valve closed
5/23/2012	1:20:12 PM	Bypass valve opened
5/23/2012	1:20:12 PM	Helium MFC set to  0.000000
5/23/2012	1:20:12 PM	H2 MFC set to  0.000000
5/23/2012	1:20:12 PM	BCl3 MFC set to  0.000000
5/23/2012	1:20:12 PM	PH3 MFC set to  0.000000
5/23/2012	1:20:12 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:20:12 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	1:20:12 PM	Tube furnace set to 0
5/23/2012	1:21:12 PM	Helium valve closed
5/23/2012	1:21:12 PM	H2 valve closed
5/23/2012	1:21:12 PM	BCl3 valve closed
5/23/2012	1:21:12 PM	PH3 valve closed
5/23/2012	1:21:12 PM	SiCl4 pre valve closed
5/23/2012	1:21:12 PM	SiCl4 post valve closed
5/23/2012	1:21:12 PM	Bypass valve closed
5/23/2012	1:21:12 PM	Bubbler valve closed
5/23/2012	1:21:12 PM	Main Vac valve opened
5/23/2012	1:21:12 PM	Helium MFC set to  0.000000
5/23/2012	1:21:12 PM	H2 MFC set to  0.000000
5/23/2012	1:21:12 PM	BCl3 MFC set to  0.000000
5/23/2012	1:21:12 PM	PH3 MFC set to  0.000000
5/23/2012	1:21:12 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:21:12 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	1:21:12 PM	Tube furnace set to 0
5/23/2012	1:21:13 PM	Run finished at 1:21 PM
5/23/2012	1:21:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2012	1:25:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2012	1:25:51 PM	Recipe started at 1:25 PM
5/23/2012	1:25:51 PM	Helium valve closed
5/23/2012	1:25:51 PM	H2 valve closed
5/23/2012	1:25:51 PM	BCl3 valve closed
5/23/2012	1:25:51 PM	PH3 valve closed
5/23/2012	1:25:51 PM	SiCl4 pre valve closed
5/23/2012	1:25:51 PM	SiCl4 post valve closed
5/23/2012	1:25:51 PM	Main Vac valve closed
5/23/2012	1:25:51 PM	Bypass valve closed
5/23/2012	1:25:51 PM	Bubbler valve closed
5/23/2012	1:25:51 PM	Helium MFC set to  0.000000
5/23/2012	1:25:51 PM	H2 MFC set to  0.000000
5/23/2012	1:25:51 PM	BCl3 MFC set to  0.000000
5/23/2012	1:25:51 PM	PH3 MFC set to  0.000000
5/23/2012	1:25:51 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:25:51 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	1:25:52 PM	Tube furnace set to 0
5/23/2012	1:25:55 PM	H2 valve closed
5/23/2012	1:25:55 PM	BCl3 valve closed
5/23/2012	1:25:55 PM	PH3 valve closed
5/23/2012	1:25:55 PM	SiCl4 pre valve closed
5/23/2012	1:25:55 PM	SiCl4 post valve closed
5/23/2012	1:25:55 PM	Main Vac valve closed
5/23/2012	1:25:55 PM	Bypass valve closed
5/23/2012	1:25:55 PM	Bubbler valve closed
5/23/2012	1:25:55 PM	Helium valve opened
5/23/2012	1:25:55 PM	Helium MFC set to  500.000000
5/23/2012	1:25:55 PM	H2 MFC set to  0.000000
5/23/2012	1:25:55 PM	BCl3 MFC set to  0.000000
5/23/2012	1:25:55 PM	PH3 MFC set to  0.000000
5/23/2012	1:25:55 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:25:55 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	1:25:55 PM	Tube furnace set to 0
5/23/2012	1:27:08 PM	Helium valve closed
5/23/2012	1:27:08 PM	H2 valve closed
5/23/2012	1:27:08 PM	BCl3 valve closed
5/23/2012	1:27:08 PM	PH3 valve closed
5/23/2012	1:27:08 PM	SiCl4 pre valve closed
5/23/2012	1:27:08 PM	SiCl4 post valve closed
5/23/2012	1:27:08 PM	Main Vac valve closed
5/23/2012	1:27:08 PM	Bypass valve closed
5/23/2012	1:27:08 PM	Bubbler valve closed
5/23/2012	1:27:08 PM	Helium MFC set to  0.000000
5/23/2012	1:27:08 PM	H2 MFC set to  0.000000
5/23/2012	1:27:08 PM	BCl3 MFC set to  0.000000
5/23/2012	1:27:08 PM	PH3 MFC set to  0.000000
5/23/2012	1:27:08 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:27:08 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	1:27:08 PM	Tube furnace set to 0
5/23/2012	1:27:09 PM	Run finished at 1:27 PM
5/23/2012	1:27:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/23/2012	1:48:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2012	1:49:00 PM	Recipe started at 1:48 PM
5/23/2012	1:49:00 PM	Helium valve closed
5/23/2012	1:49:00 PM	H2 valve closed
5/23/2012	1:49:00 PM	BCl3 valve closed
5/23/2012	1:49:00 PM	PH3 valve closed
5/23/2012	1:49:00 PM	SiCl4 pre valve closed
5/23/2012	1:49:00 PM	SiCl4 post valve closed
5/23/2012	1:49:00 PM	Main Vac valve closed
5/23/2012	1:49:00 PM	Bubbler valve closed
5/23/2012	1:49:00 PM	Bypass valve opened
5/23/2012	1:49:00 PM	Helium MFC set to  0.000000
5/23/2012	1:49:00 PM	H2 MFC set to  0.000000
5/23/2012	1:49:00 PM	BCl3 MFC set to  0.000000
5/23/2012	1:49:00 PM	PH3 MFC set to  0.000000
5/23/2012	1:49:00 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:49:00 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	1:49:00 PM	Tube furnace set to 0
5/23/2012	1:50:18 PM	Helium valve closed
5/23/2012	1:50:18 PM	H2 valve closed
5/23/2012	1:50:18 PM	BCl3 valve closed
5/23/2012	1:50:18 PM	PH3 valve closed
5/23/2012	1:50:18 PM	SiCl4 pre valve closed
5/23/2012	1:50:18 PM	SiCl4 post valve closed
5/23/2012	1:50:18 PM	Main Vac valve closed
5/23/2012	1:50:18 PM	Bubbler valve closed
5/23/2012	1:50:18 PM	Bypass valve opened
5/23/2012	1:50:18 PM	Helium MFC set to  0.000000
5/23/2012	1:50:18 PM	H2 MFC set to  0.000000
5/23/2012	1:50:18 PM	BCl3 MFC set to  0.000000
5/23/2012	1:50:18 PM	PH3 MFC set to  0.000000
5/23/2012	1:50:18 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:50:18 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	1:50:18 PM	Tube furnace set to 0
5/23/2012	1:51:18 PM	Helium valve closed
5/23/2012	1:51:18 PM	H2 valve closed
5/23/2012	1:51:18 PM	BCl3 valve closed
5/23/2012	1:51:18 PM	PH3 valve closed
5/23/2012	1:51:18 PM	SiCl4 pre valve closed
5/23/2012	1:51:18 PM	SiCl4 post valve closed
5/23/2012	1:51:18 PM	Bypass valve closed
5/23/2012	1:51:18 PM	Bubbler valve closed
5/23/2012	1:51:18 PM	Main Vac valve opened
5/23/2012	1:51:18 PM	Helium MFC set to  0.000000
5/23/2012	1:51:18 PM	H2 MFC set to  0.000000
5/23/2012	1:51:18 PM	BCl3 MFC set to  0.000000
5/23/2012	1:51:18 PM	PH3 MFC set to  0.000000
5/23/2012	1:51:18 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:51:18 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	1:51:18 PM	Tube furnace set to 0
5/23/2012	1:51:19 PM	Run finished at 1:51 PM
5/23/2012	1:51:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2012	1:51:50 PM	Program exited cleanly
5/23/2012	1:51:51 PM	Helium valve closed
5/23/2012	1:51:51 PM	H2 valve closed
5/23/2012	1:51:51 PM	BCl3 valve closed
5/23/2012	1:51:51 PM	PH3 valve closed
5/23/2012	1:51:51 PM	SiCl4 pre valve closed
5/23/2012	1:51:51 PM	SiCl4 post valve closed
5/23/2012	1:51:51 PM	Main Vac valve closed
5/23/2012	1:51:51 PM	Bypass valve closed
5/23/2012	1:51:51 PM	Bubbler valve closed
5/23/2012	1:51:51 PM	Helium MFC set to  0.000000
5/23/2012	1:51:51 PM	H2 MFC set to  0.000000
5/23/2012	1:51:51 PM	BCl3 MFC set to  0.000000
5/23/2012	1:51:51 PM	PH3 MFC set to  0.000000
5/23/2012	1:51:51 PM	SiCl4 MFC set to  0.000000
5/23/2012	1:51:51 PM	Bypass solenoid MFC set to  760.000000
5/23/2012	1:51:51 PM	Tube furnace set to 0
5/23/2012	1:51:53 PM	Main Vac valve opened
5/23/2012	2:00:21 PM	Recipe started at 2:00 PM
5/23/2012	2:00:21 PM	Helium valve closed
5/23/2012	2:00:21 PM	H2 valve closed
5/23/2012	2:00:21 PM	BCl3 valve closed
5/23/2012	2:00:21 PM	PH3 valve closed
5/23/2012	2:00:21 PM	SiCl4 pre valve closed
5/23/2012	2:00:21 PM	SiCl4 post valve closed
5/23/2012	2:00:21 PM	Main Vac valve closed
5/23/2012	2:00:21 PM	Bypass valve closed
5/23/2012	2:00:21 PM	Bubbler valve closed
5/23/2012	2:00:21 PM	Helium MFC set to  0.000000
5/23/2012	2:00:21 PM	H2 MFC set to  0.000000
5/23/2012	2:00:21 PM	BCl3 MFC set to  0.000000
5/23/2012	2:00:21 PM	PH3 MFC set to  0.000000
5/23/2012	2:00:21 PM	SiCl4 MFC set to  0.000000
5/23/2012	2:00:21 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	2:00:21 PM	Tube furnace set to 0
5/23/2012	2:00:24 PM	Helium valve closed
5/23/2012	2:00:24 PM	H2 valve closed
5/23/2012	2:00:24 PM	BCl3 valve closed
5/23/2012	2:00:24 PM	PH3 valve closed
5/23/2012	2:00:24 PM	SiCl4 pre valve closed
5/23/2012	2:00:24 PM	SiCl4 post valve closed
5/23/2012	2:00:24 PM	Main Vac valve closed
5/23/2012	2:00:24 PM	Bubbler valve closed
5/23/2012	2:00:24 PM	Bypass valve opened
5/23/2012	2:00:24 PM	Helium MFC set to  0.000000
5/23/2012	2:00:24 PM	H2 MFC set to  0.000000
5/23/2012	2:00:24 PM	BCl3 MFC set to  0.000000
5/23/2012	2:00:24 PM	PH3 MFC set to  0.000000
5/23/2012	2:00:24 PM	SiCl4 MFC set to  0.000000
5/23/2012	2:00:24 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	2:00:25 PM	Tube furnace set to 0
5/23/2012	2:00:25 PM	Helium valve closed
5/23/2012	2:00:25 PM	H2 valve closed
5/23/2012	2:00:25 PM	BCl3 valve closed
5/23/2012	2:00:25 PM	PH3 valve closed
5/23/2012	2:00:25 PM	SiCl4 pre valve closed
5/23/2012	2:00:25 PM	SiCl4 post valve closed
5/23/2012	2:00:25 PM	Main Vac valve closed
5/23/2012	2:00:25 PM	Bubbler valve closed
5/23/2012	2:00:25 PM	Bypass valve opened
5/23/2012	2:00:25 PM	Helium MFC set to  0.000000
5/23/2012	2:00:25 PM	H2 MFC set to  0.000000
5/23/2012	2:00:25 PM	BCl3 MFC set to  0.000000
5/23/2012	2:00:25 PM	PH3 MFC set to  0.000000
5/23/2012	2:00:25 PM	SiCl4 MFC set to  0.000000
5/23/2012	2:00:25 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	2:00:25 PM	Tube furnace set to 0
5/23/2012	2:00:32 PM	Helium valve closed
5/23/2012	2:00:32 PM	H2 valve closed
5/23/2012	2:00:32 PM	BCl3 valve closed
5/23/2012	2:00:32 PM	PH3 valve closed
5/23/2012	2:00:32 PM	SiCl4 pre valve closed
5/23/2012	2:00:32 PM	SiCl4 post valve closed
5/23/2012	2:00:32 PM	Bypass valve closed
5/23/2012	2:00:32 PM	Bubbler valve closed
5/23/2012	2:00:32 PM	Main Vac valve opened
5/23/2012	2:00:32 PM	Helium MFC set to  0.000000
5/23/2012	2:00:32 PM	H2 MFC set to  0.000000
5/23/2012	2:00:32 PM	BCl3 MFC set to  0.000000
5/23/2012	2:00:32 PM	PH3 MFC set to  0.000000
5/23/2012	2:00:32 PM	SiCl4 MFC set to  0.000000
5/23/2012	2:00:32 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	2:00:32 PM	Tube furnace set to 150
5/23/2012	3:44:46 PM	Run aborted at 3:44 PM
5/23/2012	3:44:46 PM	Helium valve closed
5/23/2012	3:44:46 PM	H2 valve closed
5/23/2012	3:44:46 PM	BCl3 valve closed
5/23/2012	3:44:46 PM	PH3 valve closed
5/23/2012	3:44:46 PM	SiCl4 pre valve closed
5/23/2012	3:44:46 PM	SiCl4 post valve closed
5/23/2012	3:44:46 PM	Bypass valve closed
5/23/2012	3:44:46 PM	Main Vac valve closed
5/23/2012	3:44:46 PM	Bubbler valve closed
5/23/2012	3:44:46 PM	Helium MFC set to  0.000000
5/23/2012	3:44:46 PM	H2 MFC set to  0.000000
5/23/2012	3:44:46 PM	BCl3 MFC set to  0.000000
5/23/2012	3:44:46 PM	PH3 MFC set to  0.000000
5/23/2012	3:44:46 PM	SiCl4 MFC set to  0.000000
5/23/2012	3:44:46 PM	Tube furnace set to 0
5/23/2012	3:45:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
5/23/2012	3:45:13 PM	Recipe started at 3:45 PM
5/23/2012	3:45:13 PM	Helium valve closed
5/23/2012	3:45:13 PM	H2 valve closed
5/23/2012	3:45:13 PM	BCl3 valve closed
5/23/2012	3:45:13 PM	PH3 valve closed
5/23/2012	3:45:13 PM	SiCl4 pre valve closed
5/23/2012	3:45:13 PM	SiCl4 post valve closed
5/23/2012	3:45:13 PM	Main Vac valve closed
5/23/2012	3:45:13 PM	Bubbler valve closed
5/23/2012	3:45:13 PM	Bypass valve opened
5/23/2012	3:45:13 PM	Helium MFC set to  0.000000
5/23/2012	3:45:13 PM	H2 MFC set to  0.000000
5/23/2012	3:45:13 PM	BCl3 MFC set to  0.000000
5/23/2012	3:45:13 PM	PH3 MFC set to  0.000000
5/23/2012	3:45:13 PM	SiCl4 MFC set to  0.000000
5/23/2012	3:45:13 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	3:45:13 PM	Tube furnace set to 0
5/23/2012	3:45:13 PM	Helium valve closed
5/23/2012	3:45:13 PM	H2 valve closed
5/23/2012	3:45:13 PM	BCl3 valve closed
5/23/2012	3:45:13 PM	PH3 valve closed
5/23/2012	3:45:13 PM	SiCl4 pre valve closed
5/23/2012	3:45:13 PM	SiCl4 post valve closed
5/23/2012	3:45:13 PM	Main Vac valve closed
5/23/2012	3:45:13 PM	Bubbler valve closed
5/23/2012	3:45:13 PM	Bypass valve opened
5/23/2012	3:45:13 PM	Helium MFC set to  0.000000
5/23/2012	3:45:13 PM	H2 MFC set to  0.000000
5/23/2012	3:45:13 PM	BCl3 MFC set to  0.000000
5/23/2012	3:45:13 PM	PH3 MFC set to  0.000000
5/23/2012	3:45:13 PM	SiCl4 MFC set to  0.000000
5/23/2012	3:45:13 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	3:45:13 PM	Tube furnace set to 0
5/23/2012	3:45:18 PM	Helium valve closed
5/23/2012	3:45:18 PM	H2 valve closed
5/23/2012	3:45:18 PM	BCl3 valve closed
5/23/2012	3:45:18 PM	PH3 valve closed
5/23/2012	3:45:18 PM	SiCl4 pre valve closed
5/23/2012	3:45:18 PM	SiCl4 post valve closed
5/23/2012	3:45:18 PM	Bypass valve closed
5/23/2012	3:45:18 PM	Bubbler valve closed
5/23/2012	3:45:18 PM	Main Vac valve opened
5/23/2012	3:45:18 PM	Helium MFC set to  0.000000
5/23/2012	3:45:18 PM	H2 MFC set to  0.000000
5/23/2012	3:45:18 PM	BCl3 MFC set to  0.000000
5/23/2012	3:45:18 PM	PH3 MFC set to  0.000000
5/23/2012	3:45:18 PM	SiCl4 MFC set to  0.000000
5/23/2012	3:45:18 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	3:45:19 PM	Tube furnace set to 0
5/23/2012	3:45:27 PM	H2 valve closed
5/23/2012	3:45:27 PM	BCl3 valve closed
5/23/2012	3:45:27 PM	PH3 valve closed
5/23/2012	3:45:27 PM	SiCl4 pre valve closed
5/23/2012	3:45:27 PM	SiCl4 post valve closed
5/23/2012	3:45:27 PM	Bypass valve closed
5/23/2012	3:45:27 PM	Bubbler valve closed
5/23/2012	3:45:27 PM	Helium valve opened
5/23/2012	3:45:27 PM	Main Vac valve opened
5/23/2012	3:45:27 PM	Helium MFC set to  20.000000
5/23/2012	3:45:27 PM	H2 MFC set to  0.000000
5/23/2012	3:45:27 PM	BCl3 MFC set to  0.000000
5/23/2012	3:45:27 PM	PH3 MFC set to  0.000000
5/23/2012	3:45:27 PM	SiCl4 MFC set to  0.000000
5/23/2012	3:45:27 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	3:45:27 PM	Tube furnace set to 0
5/23/2012	3:45:57 PM	Helium valve closed
5/23/2012	3:45:57 PM	H2 valve closed
5/23/2012	3:45:57 PM	BCl3 valve closed
5/23/2012	3:45:57 PM	PH3 valve closed
5/23/2012	3:45:57 PM	SiCl4 pre valve closed
5/23/2012	3:45:57 PM	SiCl4 post valve closed
5/23/2012	3:45:57 PM	Bypass valve closed
5/23/2012	3:45:57 PM	Bubbler valve closed
5/23/2012	3:45:57 PM	Main Vac valve opened
5/23/2012	3:45:57 PM	Helium MFC set to  0.000000
5/23/2012	3:45:57 PM	H2 MFC set to  0.000000
5/23/2012	3:45:57 PM	BCl3 MFC set to  0.000000
5/23/2012	3:45:57 PM	PH3 MFC set to  0.000000
5/23/2012	3:45:57 PM	SiCl4 MFC set to  0.000000
5/23/2012	3:45:57 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	3:45:57 PM	Tube furnace set to 0
5/23/2012	3:46:27 PM	H2 valve closed
5/23/2012	3:46:27 PM	BCl3 valve closed
5/23/2012	3:46:27 PM	PH3 valve closed
5/23/2012	3:46:27 PM	SiCl4 pre valve closed
5/23/2012	3:46:27 PM	SiCl4 post valve closed
5/23/2012	3:46:27 PM	Bypass valve closed
5/23/2012	3:46:27 PM	Bubbler valve closed
5/23/2012	3:46:27 PM	Helium valve opened
5/23/2012	3:46:27 PM	Main Vac valve opened
5/23/2012	3:46:27 PM	Helium MFC set to  20.000000
5/23/2012	3:46:27 PM	H2 MFC set to  0.000000
5/23/2012	3:46:27 PM	BCl3 MFC set to  0.000000
5/23/2012	3:46:27 PM	PH3 MFC set to  0.000000
5/23/2012	3:46:27 PM	SiCl4 MFC set to  0.000000
5/23/2012	3:46:27 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	3:46:27 PM	Tube furnace set to 0
5/23/2012	3:46:57 PM	Helium valve closed
5/23/2012	3:46:57 PM	H2 valve closed
5/23/2012	3:46:57 PM	BCl3 valve closed
5/23/2012	3:46:57 PM	PH3 valve closed
5/23/2012	3:46:57 PM	SiCl4 pre valve closed
5/23/2012	3:46:57 PM	SiCl4 post valve closed
5/23/2012	3:46:57 PM	Bypass valve closed
5/23/2012	3:46:57 PM	Bubbler valve closed
5/23/2012	3:46:57 PM	Main Vac valve opened
5/23/2012	3:46:57 PM	Helium MFC set to  0.000000
5/23/2012	3:46:57 PM	H2 MFC set to  0.000000
5/23/2012	3:46:57 PM	BCl3 MFC set to  0.000000
5/23/2012	3:46:57 PM	PH3 MFC set to  0.000000
5/23/2012	3:46:57 PM	SiCl4 MFC set to  0.000000
5/23/2012	3:46:57 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	3:46:58 PM	Tube furnace set to 0
5/23/2012	3:47:28 PM	H2 valve closed
5/23/2012	3:47:28 PM	BCl3 valve closed
5/23/2012	3:47:28 PM	PH3 valve closed
5/23/2012	3:47:28 PM	SiCl4 pre valve closed
5/23/2012	3:47:28 PM	SiCl4 post valve closed
5/23/2012	3:47:28 PM	Bypass valve closed
5/23/2012	3:47:28 PM	Bubbler valve closed
5/23/2012	3:47:28 PM	Helium valve opened
5/23/2012	3:47:28 PM	Main Vac valve opened
5/23/2012	3:47:28 PM	Helium MFC set to  20.000000
5/23/2012	3:47:28 PM	H2 MFC set to  0.000000
5/23/2012	3:47:28 PM	BCl3 MFC set to  0.000000
5/23/2012	3:47:28 PM	PH3 MFC set to  0.000000
5/23/2012	3:47:28 PM	SiCl4 MFC set to  0.000000
5/23/2012	3:47:28 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	3:47:28 PM	Tube furnace set to 0
5/23/2012	3:47:29 PM	Run aborted at 3:47 PM
5/23/2012	3:47:29 PM	Helium valve closed
5/23/2012	3:47:29 PM	H2 valve closed
5/23/2012	3:47:29 PM	BCl3 valve closed
5/23/2012	3:47:29 PM	PH3 valve closed
5/23/2012	3:47:29 PM	SiCl4 pre valve closed
5/23/2012	3:47:29 PM	SiCl4 post valve closed
5/23/2012	3:47:29 PM	Bypass valve closed
5/23/2012	3:47:29 PM	Main Vac valve closed
5/23/2012	3:47:29 PM	Bubbler valve closed
5/23/2012	3:47:29 PM	Helium MFC set to  0.000000
5/23/2012	3:47:29 PM	H2 MFC set to  0.000000
5/23/2012	3:47:29 PM	BCl3 MFC set to  0.000000
5/23/2012	3:47:29 PM	PH3 MFC set to  0.000000
5/23/2012	3:47:29 PM	SiCl4 MFC set to  0.000000
5/23/2012	3:47:29 PM	Tube furnace set to 0
5/23/2012	3:47:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
5/23/2012	3:47:30 PM	Main Vac valve opened
5/23/2012	3:48:29 PM	Main Vac valve closed
5/23/2012	3:48:43 PM	Main Vac valve opened
5/23/2012	4:05:10 PM	Recipe started at 4:05 PM
5/23/2012	4:05:10 PM	Helium valve closed
5/23/2012	4:05:10 PM	H2 valve closed
5/23/2012	4:05:10 PM	BCl3 valve closed
5/23/2012	4:05:10 PM	PH3 valve closed
5/23/2012	4:05:10 PM	SiCl4 pre valve closed
5/23/2012	4:05:10 PM	SiCl4 post valve closed
5/23/2012	4:05:10 PM	Main Vac valve closed
5/23/2012	4:05:10 PM	Bypass valve closed
5/23/2012	4:05:10 PM	Bubbler valve closed
5/23/2012	4:05:10 PM	Helium MFC set to  0.000000
5/23/2012	4:05:10 PM	H2 MFC set to  0.000000
5/23/2012	4:05:10 PM	BCl3 MFC set to  0.000000
5/23/2012	4:05:10 PM	PH3 MFC set to  0.000000
5/23/2012	4:05:10 PM	SiCl4 MFC set to  0.000000
5/23/2012	4:05:10 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	4:05:10 PM	Tube furnace set to 0
5/23/2012	4:05:13 PM	Helium valve closed
5/23/2012	4:05:13 PM	BCl3 valve closed
5/23/2012	4:05:13 PM	PH3 valve closed
5/23/2012	4:05:13 PM	SiCl4 pre valve closed
5/23/2012	4:05:13 PM	SiCl4 post valve closed
5/23/2012	4:05:13 PM	Main Vac valve closed
5/23/2012	4:05:13 PM	Bypass valve closed
5/23/2012	4:05:13 PM	Bubbler valve closed
5/23/2012	4:05:13 PM	H2 valve opened
5/23/2012	4:05:13 PM	Helium MFC set to  0.000000
5/23/2012	4:05:13 PM	H2 MFC set to  500.000000
5/23/2012	4:05:13 PM	BCl3 MFC set to  0.000000
5/23/2012	4:05:13 PM	PH3 MFC set to  0.000000
5/23/2012	4:05:13 PM	SiCl4 MFC set to  0.000000
5/23/2012	4:05:13 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	4:05:14 PM	Tube furnace set to 50
5/23/2012	4:06:26 PM	Helium valve closed
5/23/2012	4:06:26 PM	BCl3 valve closed
5/23/2012	4:06:26 PM	PH3 valve closed
5/23/2012	4:06:26 PM	SiCl4 pre valve closed
5/23/2012	4:06:26 PM	SiCl4 post valve closed
5/23/2012	4:06:26 PM	Main Vac valve closed
5/23/2012	4:06:26 PM	Bypass valve closed
5/23/2012	4:06:26 PM	H2 valve opened
5/23/2012	4:06:26 PM	Bubbler valve opened
5/23/2012	4:06:26 PM	Helium MFC set to  0.000000
5/23/2012	4:06:26 PM	H2 MFC set to  500.000000
5/23/2012	4:06:26 PM	BCl3 MFC set to  0.000000
5/23/2012	4:06:26 PM	PH3 MFC set to  0.000000
5/23/2012	4:06:26 PM	SiCl4 MFC set to  0.000000
5/23/2012	4:06:26 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	4:06:26 PM	Tube furnace set to 50
5/23/2012	4:06:27 PM	Helium valve closed
5/23/2012	4:06:27 PM	BCl3 valve closed
5/23/2012	4:06:27 PM	PH3 valve closed
5/23/2012	4:06:27 PM	SiCl4 pre valve closed
5/23/2012	4:06:27 PM	SiCl4 post valve closed
5/23/2012	4:06:27 PM	Main Vac valve closed
5/23/2012	4:06:27 PM	Bypass valve closed
5/23/2012	4:06:27 PM	H2 valve opened
5/23/2012	4:06:27 PM	Bubbler valve opened
5/23/2012	4:06:27 PM	Helium MFC set to  0.000000
5/23/2012	4:06:27 PM	H2 MFC set to  500.000000
5/23/2012	4:06:27 PM	BCl3 MFC set to  0.000000
5/23/2012	4:06:27 PM	PH3 MFC set to  0.000000
5/23/2012	4:06:27 PM	SiCl4 MFC set to  0.000000
5/23/2012	4:06:27 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	4:06:27 PM	Tube furnace set to 1000
5/23/2012	4:26:27 PM	Helium valve closed
5/23/2012	4:26:27 PM	BCl3 valve closed
5/23/2012	4:26:27 PM	Main Vac valve closed
5/23/2012	4:26:27 PM	Bypass valve closed
5/23/2012	4:26:27 PM	H2 valve opened
5/23/2012	4:26:27 PM	PH3 valve opened
5/23/2012	4:26:27 PM	SiCl4 pre valve opened
5/23/2012	4:26:27 PM	SiCl4 post valve opened
5/23/2012	4:26:27 PM	Bubbler valve opened
5/23/2012	4:26:27 PM	Helium MFC set to  0.000000
5/23/2012	4:26:27 PM	H2 MFC set to  500.000000
5/23/2012	4:26:27 PM	BCl3 MFC set to  0.000000
5/23/2012	4:26:27 PM	PH3 MFC set to  0.300000
5/23/2012	4:26:27 PM	SiCl4 MFC set to  50.000000
5/23/2012	4:26:27 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	4:26:27 PM	Tube furnace set to 1000
5/23/2012	4:46:27 PM	Helium valve closed
5/23/2012	4:46:27 PM	BCl3 valve closed
5/23/2012	4:46:27 PM	PH3 valve closed
5/23/2012	4:46:27 PM	SiCl4 pre valve closed
5/23/2012	4:46:27 PM	SiCl4 post valve closed
5/23/2012	4:46:27 PM	Main Vac valve closed
5/23/2012	4:46:27 PM	Bypass valve closed
5/23/2012	4:46:27 PM	H2 valve opened
5/23/2012	4:46:27 PM	Bubbler valve opened
5/23/2012	4:46:27 PM	Helium MFC set to  0.000000
5/23/2012	4:46:27 PM	H2 MFC set to  500.000000
5/23/2012	4:46:27 PM	BCl3 MFC set to  0.000000
5/23/2012	4:46:27 PM	PH3 MFC set to  0.000000
5/23/2012	4:46:27 PM	SiCl4 MFC set to  0.000000
5/23/2012	4:46:27 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	4:46:28 PM	Tube furnace set to 950
5/23/2012	4:49:28 PM	H2 valve closed
5/23/2012	4:49:28 PM	BCl3 valve closed
5/23/2012	4:49:28 PM	PH3 valve closed
5/23/2012	4:49:28 PM	SiCl4 pre valve closed
5/23/2012	4:49:28 PM	SiCl4 post valve closed
5/23/2012	4:49:28 PM	Main Vac valve closed
5/23/2012	4:49:28 PM	Bypass valve closed
5/23/2012	4:49:28 PM	Helium valve opened
5/23/2012	4:49:28 PM	Bubbler valve opened
5/23/2012	4:49:28 PM	Helium MFC set to  500.000000
5/23/2012	4:49:28 PM	H2 MFC set to  0.000000
5/23/2012	4:49:28 PM	BCl3 MFC set to  0.000000
5/23/2012	4:49:28 PM	PH3 MFC set to  0.000000
5/23/2012	4:49:28 PM	SiCl4 MFC set to  0.000000
5/23/2012	4:49:28 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	4:49:28 PM	Tube furnace set to 900
5/23/2012	4:52:28 PM	H2 valve closed
5/23/2012	4:52:28 PM	BCl3 valve closed
5/23/2012	4:52:28 PM	PH3 valve closed
5/23/2012	4:52:28 PM	SiCl4 pre valve closed
5/23/2012	4:52:28 PM	SiCl4 post valve closed
5/23/2012	4:52:28 PM	Main Vac valve closed
5/23/2012	4:52:28 PM	Bypass valve closed
5/23/2012	4:52:28 PM	Helium valve opened
5/23/2012	4:52:28 PM	Bubbler valve opened
5/23/2012	4:52:28 PM	Helium MFC set to  500.000000
5/23/2012	4:52:28 PM	H2 MFC set to  0.000000
5/23/2012	4:52:28 PM	BCl3 MFC set to  0.000000
5/23/2012	4:52:28 PM	PH3 MFC set to  0.000000
5/23/2012	4:52:28 PM	SiCl4 MFC set to  0.000000
5/23/2012	4:52:28 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	4:52:28 PM	Tube furnace set to 850
5/23/2012	4:55:28 PM	H2 valve closed
5/23/2012	4:55:28 PM	BCl3 valve closed
5/23/2012	4:55:28 PM	PH3 valve closed
5/23/2012	4:55:28 PM	SiCl4 pre valve closed
5/23/2012	4:55:28 PM	SiCl4 post valve closed
5/23/2012	4:55:28 PM	Main Vac valve closed
5/23/2012	4:55:28 PM	Bypass valve closed
5/23/2012	4:55:28 PM	Helium valve opened
5/23/2012	4:55:28 PM	Bubbler valve opened
5/23/2012	4:55:28 PM	Helium MFC set to  500.000000
5/23/2012	4:55:28 PM	H2 MFC set to  0.000000
5/23/2012	4:55:28 PM	BCl3 MFC set to  0.000000
5/23/2012	4:55:28 PM	PH3 MFC set to  0.000000
5/23/2012	4:55:28 PM	SiCl4 MFC set to  0.000000
5/23/2012	4:55:28 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	4:55:28 PM	Tube furnace set to 800
5/23/2012	4:58:28 PM	H2 valve closed
5/23/2012	4:58:28 PM	BCl3 valve closed
5/23/2012	4:58:28 PM	PH3 valve closed
5/23/2012	4:58:28 PM	SiCl4 pre valve closed
5/23/2012	4:58:28 PM	SiCl4 post valve closed
5/23/2012	4:58:28 PM	Main Vac valve closed
5/23/2012	4:58:28 PM	Bypass valve closed
5/23/2012	4:58:28 PM	Helium valve opened
5/23/2012	4:58:28 PM	Bubbler valve opened
5/23/2012	4:58:28 PM	Helium MFC set to  500.000000
5/23/2012	4:58:28 PM	H2 MFC set to  0.000000
5/23/2012	4:58:28 PM	BCl3 MFC set to  0.000000
5/23/2012	4:58:28 PM	PH3 MFC set to  0.000000
5/23/2012	4:58:28 PM	SiCl4 MFC set to  0.000000
5/23/2012	4:58:28 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	4:58:29 PM	Tube furnace set to 750
5/23/2012	5:01:29 PM	H2 valve closed
5/23/2012	5:01:29 PM	BCl3 valve closed
5/23/2012	5:01:29 PM	PH3 valve closed
5/23/2012	5:01:29 PM	SiCl4 pre valve closed
5/23/2012	5:01:29 PM	SiCl4 post valve closed
5/23/2012	5:01:29 PM	Main Vac valve closed
5/23/2012	5:01:29 PM	Bypass valve closed
5/23/2012	5:01:29 PM	Helium valve opened
5/23/2012	5:01:29 PM	Bubbler valve opened
5/23/2012	5:01:29 PM	Helium MFC set to  500.000000
5/23/2012	5:01:29 PM	H2 MFC set to  0.000000
5/23/2012	5:01:29 PM	BCl3 MFC set to  0.000000
5/23/2012	5:01:29 PM	PH3 MFC set to  0.000000
5/23/2012	5:01:29 PM	SiCl4 MFC set to  0.000000
5/23/2012	5:01:29 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	5:01:29 PM	Tube furnace set to 0
5/23/2012	5:25:04 PM	Run aborted at 5:25 PM
5/23/2012	5:25:04 PM	Helium valve closed
5/23/2012	5:25:04 PM	H2 valve closed
5/23/2012	5:25:04 PM	BCl3 valve closed
5/23/2012	5:25:04 PM	PH3 valve closed
5/23/2012	5:25:04 PM	SiCl4 pre valve closed
5/23/2012	5:25:04 PM	SiCl4 post valve closed
5/23/2012	5:25:04 PM	Bypass valve closed
5/23/2012	5:25:04 PM	Main Vac valve closed
5/23/2012	5:25:04 PM	Bubbler valve closed
5/23/2012	5:25:04 PM	Helium MFC set to  0.000000
5/23/2012	5:25:04 PM	H2 MFC set to  0.000000
5/23/2012	5:25:04 PM	BCl3 MFC set to  0.000000
5/23/2012	5:25:04 PM	PH3 MFC set to  0.000000
5/23/2012	5:25:04 PM	SiCl4 MFC set to  0.000000
5/23/2012	5:25:05 PM	Tube furnace set to 0
5/23/2012	5:33:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/23/2012	5:33:57 PM	Recipe started at 5:33 PM
5/23/2012	5:33:57 PM	Helium valve closed
5/23/2012	5:33:57 PM	H2 valve closed
5/23/2012	5:33:57 PM	BCl3 valve closed
5/23/2012	5:33:57 PM	PH3 valve closed
5/23/2012	5:33:57 PM	SiCl4 pre valve closed
5/23/2012	5:33:57 PM	SiCl4 post valve closed
5/23/2012	5:33:57 PM	Main Vac valve closed
5/23/2012	5:33:57 PM	Bubbler valve closed
5/23/2012	5:33:57 PM	Bypass valve opened
5/23/2012	5:33:57 PM	Helium MFC set to  0.000000
5/23/2012	5:33:57 PM	H2 MFC set to  0.000000
5/23/2012	5:33:57 PM	BCl3 MFC set to  0.000000
5/23/2012	5:33:57 PM	PH3 MFC set to  0.000000
5/23/2012	5:33:57 PM	SiCl4 MFC set to  0.000000
5/23/2012	5:33:57 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	5:33:57 PM	Tube furnace set to 0
5/23/2012	5:35:09 PM	Helium valve closed
5/23/2012	5:35:09 PM	H2 valve closed
5/23/2012	5:35:09 PM	BCl3 valve closed
5/23/2012	5:35:09 PM	PH3 valve closed
5/23/2012	5:35:09 PM	SiCl4 pre valve closed
5/23/2012	5:35:09 PM	SiCl4 post valve closed
5/23/2012	5:35:09 PM	Main Vac valve closed
5/23/2012	5:35:09 PM	Bubbler valve closed
5/23/2012	5:35:09 PM	Bypass valve opened
5/23/2012	5:35:09 PM	Helium MFC set to  0.000000
5/23/2012	5:35:09 PM	H2 MFC set to  0.000000
5/23/2012	5:35:09 PM	BCl3 MFC set to  0.000000
5/23/2012	5:35:09 PM	PH3 MFC set to  0.000000
5/23/2012	5:35:09 PM	SiCl4 MFC set to  0.000000
5/23/2012	5:35:09 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	5:35:09 PM	Tube furnace set to 0
5/23/2012	5:36:09 PM	Helium valve closed
5/23/2012	5:36:09 PM	H2 valve closed
5/23/2012	5:36:09 PM	BCl3 valve closed
5/23/2012	5:36:09 PM	PH3 valve closed
5/23/2012	5:36:09 PM	SiCl4 pre valve closed
5/23/2012	5:36:09 PM	SiCl4 post valve closed
5/23/2012	5:36:09 PM	Bypass valve closed
5/23/2012	5:36:09 PM	Bubbler valve closed
5/23/2012	5:36:09 PM	Main Vac valve opened
5/23/2012	5:36:09 PM	Helium MFC set to  0.000000
5/23/2012	5:36:09 PM	H2 MFC set to  0.000000
5/23/2012	5:36:09 PM	BCl3 MFC set to  0.000000
5/23/2012	5:36:09 PM	PH3 MFC set to  0.000000
5/23/2012	5:36:09 PM	SiCl4 MFC set to  0.000000
5/23/2012	5:36:09 PM	Bypass solenoid MFC set to  0.000000
5/23/2012	5:36:09 PM	Tube furnace set to 0
5/23/2012	5:36:10 PM	Run finished at 5:36 PM
5/23/2012	5:36:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
